Characterization of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

A. A. Ogwu; R. W. Lamberton; S. Morley; P. Maguire; J. McLaughlin

doi:10.1016/S0921-4526(99)00138-6

Characterization of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

A. A. Ogwu, R. W. Lamberton, S. Morley, P. Maguire, J. McLaughlin

Botswana International University of Science & Technology

Research output: Contribution to journal › Article › peer-review

94 Citations (Scopus)

Abstract

Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time.

Original language	English
Pages (from-to)	335-344
Number of pages	10
Journal	Physica B: Condensed Matter
Volume	269
Issue number	3-4
DOIs	https://doi.org/10.1016/S0921-4526(99)00138-6
Publication status	Published - Sept 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1016/S0921-4526(99)00138-6

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abstract = "Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time.",

author = "Ogwu, {A. A.} and Lamberton, {R. W.} and S. Morley and P. Maguire and J. McLaughlin",

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T1 - Characterization of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

AU - Ogwu, A. A.

AU - Lamberton, R. W.

AU - Morley, S.

AU - Maguire, P.

AU - McLaughlin, J.

PY - 1999/9

Y1 - 1999/9

N2 - Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time.

AB - Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time.

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JO - Physica B: Condensed Matter

JF - Physica B: Condensed Matter

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ER -

Characterization of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

Abstract

All Science Journal Classification (ASJC) codes

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