Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Philip Oluseyi Oladijo

doi:10.1016/j.dib.2020.105205

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde, Esther Titilayo Akinlabi, Philip Oluseyi Oladijo

Chemical, Materials & Metallurgical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

Original language	English
Article number	105205
Number of pages	10
Journal	Data in Brief
Volume	29
DOIs	https://doi.org/10.1016/j.dib.2020.105205
Publication status	Published - Apr 2020

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10.1016/j.dib.2020.105205

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title = "Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering",

abstract = "The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.",

author = "Abegunde, {Olayinka Oluwatosin} and Akinlabi, {Esther Titilayo} and Oladijo, {Philip Oluseyi}",

note = "{\textcopyright} 2020 The Authors.",

year = "2020",

month = apr,

doi = "10.1016/j.dib.2020.105205",

language = "English",

volume = "29",

journal = "Data in Brief",

issn = "2352-3409",

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T1 - Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

AU - Abegunde, Olayinka Oluwatosin

AU - Akinlabi, Esther Titilayo

AU - Oladijo, Philip Oluseyi

PY - 2020/4

Y1 - 2020/4

N2 - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

AB - The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

UR - https://www.mendeley.com/catalogue/be50061d-12f8-3f0b-a540-07e2ae7cc7e9/

U2 - 10.1016/j.dib.2020.105205

DO - 10.1016/j.dib.2020.105205

M3 - Article

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SN - 2352-3409

VL - 29

JO - Data in Brief

JF - Data in Brief

M1 - 105205

ER -

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

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