Effect of AFM scan size on the scaling law of sputtered aluminium thin films

F. M. Mwema; Esther T. Akinlabi; O. P. Oladijo; Stephen A. Akinlabi; S. Hassan

doi:10.1007/978-981-15-5753-8_16

Effect of AFM scan size on the scaling law of sputtered aluminium thin films

F. M. Mwema, Esther T. Akinlabi, O. P. Oladijo, Stephen A. Akinlabi, S. Hassan

Chemical, Materials & Metallurgical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.

Original language	English
Title of host publication	Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019
Editors	Seyed Sattar Emamian, Farazila Yusof, Mokhtar Awang
Publisher	Springer Nature, Singapore
Pages	171-176
Number of pages	6
ISBN (Electronic)	978-981-15-5753-8
ISBN (Print)	978-981-15-5752-1
DOIs	https://doi.org/10.1007/978-981-15-5753-8_16
Publication status	Published - Sept 2020
Event	5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019 - Kuala Lumpur, Malaysia Duration: Nov 19 2019 → Nov 21 2019

Publication series

Name	Lecture Notes in Mechanical Engineering
ISSN (Print)	2195-4356
ISSN (Electronic)	2195-4364

Conference

Conference	5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019
Country/Territory	Malaysia
City	Kuala Lumpur
Period	11/19/19 → 11/21/19

All Science Journal Classification (ASJC) codes

Automotive Engineering
Aerospace Engineering
Mechanical Engineering
Fluid Flow and Transfer Processes

Access to Document

10.1007/978-981-15-5753-8_16

Cite this

Mwema, F. M., Akinlabi, E. T., Oladijo, O. P., Akinlabi, S. A., & Hassan, S. (2020). Effect of AFM scan size on the scaling law of sputtered aluminium thin films. In S. S. Emamian, F. Yusof, & M. Awang (Eds.), Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019 (pp. 171-176). (Lecture Notes in Mechanical Engineering). Springer Nature, Singapore. https://doi.org/10.1007/978-981-15-5753-8_16

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title = "Effect of AFM scan size on the scaling law of sputtered aluminium thin films",

abstract = "The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.",

author = "Mwema, {F. M.} and Akinlabi, {Esther T.} and Oladijo, {O. P.} and Akinlabi, {Stephen A.} and S. Hassan",

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Mwema, FM, Akinlabi, ET, Oladijo, OP, Akinlabi, SA & Hassan, S 2020, Effect of AFM scan size on the scaling law of sputtered aluminium thin films. in SS Emamian, F Yusof & M Awang (eds), Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019. Lecture Notes in Mechanical Engineering, Springer Nature, Singapore, pp. 171-176, 5th International Conference on Mechanical, Manufacturing and Plant Engineering, ICMMPE 2019, Kuala Lumpur, Malaysia, 11/19/19. https://doi.org/10.1007/978-981-15-5753-8_16

Effect of AFM scan size on the scaling law of sputtered aluminium thin films. / Mwema, F. M.; Akinlabi, Esther T.; Oladijo, O. P. et al.
Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019. ed. / Seyed Sattar Emamian; Farazila Yusof; Mokhtar Awang. Springer Nature, Singapore, 2020. p. 171-176 (Lecture Notes in Mechanical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Hassan, S.

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AB - The effect of scan size of the atomic force microscopy (AFM) imaging on the fractal characteristics of aluminium thin films deposited on stainless steel substrates by radiofrequency magnetron sputtering is presented. Three scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm were used to obtain the images on the AFM facility. Visual examination revealed that using very high scan size (10 × 10 μm) captured poorer images, although with more features. One-dimensional fractal dimensions were obtained as 1.610 ± 0.012, 1.606 ± 0.011 and 1.563 ± 0.014 for scan sizes of 3 × 3 μm, 5 × 5 μm and 10 × 10 μm, respectively. Multifractal analyses revealed that images obtained at lower scan sizes (3 × 3 μm and 5 × 5 μm) were mono-fractal, whereas those obtained at scan size of 10 × 10 μm were multifractal. The results suggest that the scan size can significantly influence the scaling results of the AFM measurements and therefore should be carefully chosen.

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Mwema FM, Akinlabi ET, Oladijo OP, Akinlabi SA, Hassan S. Effect of AFM scan size on the scaling law of sputtered aluminium thin films. In Emamian SS, Yusof F, Awang M, editors, Advances in Manufacturing Engineering - Selected Articles from ICMMPE 2019. Springer Nature, Singapore. 2020. p. 171-176. (Lecture Notes in Mechanical Engineering). doi: 10.1007/978-981-15-5753-8_16

Effect of AFM scan size on the scaling law of sputtered aluminium thin films

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