Effect of varying low substrate temperature on sputtered aluminium films

Keyphrases

• Substrate Temperature 100%
• Aluminum Film 100%
• Elastic Modulus 66%
• Temperature Field 33%
• Porosity 33%
• Melting Temperature 33%
• Low Temperature 33%
• High Temperature 33%
• Temperature Effect 33%
• High Hardness 33%
• Surface Structure 33%
• Hardness Values 33%
• Atomic Force Microscopy 33%
• Large-scale Structure 33%
• Microscopic Analysis 33%
• Stainless Steel 33%
• Field Emission Scanning Electron Microscopy (FE-SEM) 33%
• Low-cost Substrates 33%
• Al Thin Film 33%
• Indenter 33%
• Aluminum Thin Films 33%
• Thin Film Deposition 33%
• Constant Power 33%
• Contact Depth 33%
• Fractal Dimension D 33%

Engineering

• Substrate Temperature 100%
• Aluminum Film 100%
• Thin Films 50%
• Young's Modulus 50%
• Temperature Field 25%
• Porosity 25%
• Melting Temperature 25%
• Low-Temperature 25%
• Atomic Force Microscopy 25%
• Stainless Steel 25%
• Hardness Value 25%
• Field-Emission Scanning Electron Microscopy 25%
• Creep 25%
• Fractal Dimension 25%
• Structure Surface 25%

Material Science

• Film 100%
• Aluminum 100%
• Elastic Moduli 66%
• Surface Structure 33%
• Thin Films 33%
• Amorphous Material 33%
• Stainless Steel 33%
• Field Emission Scanning Electron Microscopy 33%
• Microscopy 33%
• Thin Film Deposition 33%
• Creep 33%