Influence of deposition parameters on the residual stresses of WC-Wo sputtered thin films

Engineering & Materials Science

• Thin films 71%
• Residual stresses 65%
• Sputtering 27%
• Substrates 15%
• Tungsten carbide 13%
• Stress measurement 13%
• Cobalt 12%
• Compressive stress 11%
• X ray diffraction 10%
• Carbon steel 10%
• X rays 9%
• Coatings 8%

Physics & Astronomy

• residual stress 69%
• thin films 38%
• sputtering 16%
• tungsten carbides 13%
• stress measurement 12%
• cobalt 10%
• x rays 9%
• manipulators 9%
• steels 7%
• coatings 7%
• diffraction 5%
• performance 4%

Chemical Compounds

• Residual Stress 100%
• Sputtering 23%
• X-Ray Spectra 14%
• Tungsten Carbide 13%
• Surface 13%
• Measurement Method 13%
• Amorphous Material 7%
• Coating Agent 6%
• X-Ray Diffraction 5%